In situ probe measurements of plasma parameters during the deposition of boron coatings by the magnetron method
Sign Up to like & getrecommendations! Published in 2023 at "Technical Physics"
DOI: 10.21883/tp.2023.01.55443.219-22
Abstract: The features of the probe technique are described and the results of measuring the parameters of plasma generated by a planar magnetron sputtering system with a pure boron target during coating deposition are presented. A… read more here.
Keywords: situ probe; measurements plasma; boron; probe measurements ... See more keywords