Distinguishing various influences on the electrical properties of thin-barrier AlGaN/GaN heterojunctions with in-situ SiNx caps
Sign Up to like & getrecommendations! Published in 2021 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2021.105907
Abstract: Abstract Understanding the individual contributions of the factors that influence the electrical properties of a material is important for controlling these properties. In this study, the effects of multiple factors on the electrical properties of… read more here.
Keywords: electrical properties; algan gan; barrier algan; gan heterojunctions ... See more keywords
Effect of in-situ SiNx grown with different carrier gas on structural and electrical properties of GaN-based MISHEMTs
Sign Up to like & getrecommendations! Published in 2023 at "Applied Physics Letters"
DOI: 10.1063/5.0146447
Abstract: In this work, the effect of in situ SiNx grown with different carrier gas on the structural and electrical properties of the SiNx/AlGaN/GaN MIS-HEMTs is studied. It was found that the growth rate of SiNx… read more here.
Keywords: carrier gas; carrier; growth; situ sinx ... See more keywords