Analysis of grain size in FePt films fabricated using remote plasma deposition
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DOI: 10.1016/j.jmmm.2017.07.057
Abstract: Abstract Remote plasma sputtering (RPS) offers a high degree of control over the sputtering parameters used to deposit thin metallic films and has demonstrated a capability to control the media grain size distribution. Narrow grain… read more here.
Keywords: remote plasma; size; grain size; size fept ... See more keywords