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Published in 2018 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aac001
Abstract: A micro-engineered, skimmer-based vacuum interface has been demonstrated and used to investigate gas dynamics on a sub-millimeter length scale. The interface is fabricated as a stacked assembly of silicon dies, based on an anisotropically etched…
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Keywords:
supersonic jet;
jet;
engineered skimmer;
jet interactions ... See more keywords