A sleeve and bulk method for fabrication of photonic structures with features on multiple length scales
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DOI: 10.1088/1361-6528/ac9391
Abstract: Traditional photonic structures such as photonic crystals utilize (a) large arrays of small features with the same size and pitch and (b) a small number of larger features such as diffraction outcouplers. In conventional nanofabrication,… read more here.
Keywords: method fabrication; sleeve bulk; bulk method; photonic structures ... See more keywords