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Published in 2020 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2020.105252
Abstract: Abstract The fixed diamond wire is widely used to slicing hard and brittle crystal material, such as mono-crystalline silicon, polycrystalline silicon, sapphire, silicon carbide, and so on. The slicing capability of fixed diamond wire should…
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Keywords:
wire;
method;
fixed diamond;
diamond ... See more keywords