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Published in 2022 at "Materials"
DOI: 10.3390/ma15092966
Abstract: In this study, a partially fluorine-terminated solution-gate field-effect transistor sensor with a smaller amount of unexpectedly generated fluorohydrocarbon film on a polycrystalline diamond channel is described. A conventional method utilizing inductively coupled plasma with fluorocarbon…
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Keywords:
gas;
smaller amount;
fluorocarbon;
film ... See more keywords