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1
Published in 2017 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/aa556b
Abstract: In this study, bridge-type micro-hotplates (MHP) with an SU-8 supporting layer were proposed for smart gas sensor applications. The proposed MHP consisted of a heating membrane with an area of 140 µm × 140 µm,…
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Keywords:
type micro;
supporting layer;
micro hotplates;
gas ... See more keywords
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2
Published in 2023 at "IEEE Sensors Journal"
DOI: 10.1109/jsen.2023.3268342
Abstract: Over the past decade, machine learning (ML) and artificial intelligence (AI) have attracted great interest in research and various practical applications. Currently, smart, fast, and high sensitivity with excellent selectivity are becoming increasingly interesting due…
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Keywords:
gas;
machine learning;
smart gas;
sensor ... See more keywords