Sign Up to like & get
recommendations!
0
Published in 2018 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2018.02.029
Abstract: Abstract Herein, we present organic molecular beam deposition to fabricate (sub-)micrometer-thin polydimethylsiloxane (PDMS) substrate-fixed films with a thickness homogeneity better than 2% on square centimeters. Their surface roughness and wrinkle morphology is controlled by the…
read more here.
Keywords:
microscopy;
smart nanostructures;
engineered smart;
polydimethylsiloxane films ... See more keywords