The Implementation of a Smart Sampling Scheme C2O Utilizing Virtual Metrology in Semiconductor Manufacturing
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DOI: 10.1109/access.2021.3103235
Abstract: Virtual metrology (VM) is an enabling technology capable of performing virtual inspection on the metrology quality of wafers. Instead of physically acquiring the metrology measurements, VM applies conjecture models on the process data of wafers… read more here.
Keywords: system; metrology; sampling scheme; smart sampling ... See more keywords