Advanced FD-SOI and Beyond Low Temperature SmartCut™ Enables High Density 3-D SoC Applications
Sign Up to like & getrecommendations! Published in 2019 at "IEEE Journal of the Electron Devices Society"
DOI: 10.1109/jeds.2019.2916460
Abstract: Beyond 65FD-SOI, 28FD-SOI, and 22FD-SOI production granted technologies, SmartCut™ development supports both advanced FD-SOI and low temperature SOI roadmaps. Ultrathin SOI and BOX materials developments are reported, including 4-nm SOI and 15-nm BOX layers, with… read more here.
Keywords: smartcut; density; soi; low temperature ... See more keywords