Synthesis and study of highly dense and smooth TiN thin films
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DOI: 10.1016/j.matchemphys.2021.124648
Abstract: This study aims towards a systematic reciprocity of the tunable synthesis parameters - partial pressure of N$_2$ gas, ion energy (\Ei) and Ti interface in TiN thin film samples deposited using ion beam sputtering at… read more here.
Keywords: thin films; highly dense; dense smooth; smooth tin ... See more keywords