Electrical Evolution of p-Type SnOx Film and Transistor Deposited by RF Magnetron Sputtering
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DOI: 10.1109/ted.2023.3266417
Abstract: In this work, by altering oxygen partial pressure (OPP) and sputtering power ( ${P}_{\text {RF}}$ ) of the radio frequency (RF) magnetron sputtering process, we investigate electrical evolution of the p-type SnOx film and transistor.… read more here.
Keywords: snox film; inline formula; film transistor; snox ... See more keywords