Characterization and study of high conductivity antimony-doped tin oxide thin films grown by mist chemical vapor deposition
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DOI: 10.1039/d3ra00359k
Abstract: Antimony doped tin oxide thin films are grown at atmospheric pressure using a home-built mist chemical vapor deposition system, which is an environmental-friendly technique with low energy consumption. For obtaining high quality Sb:SnOx films, different… read more here.
Keywords: antimony doped; thin films; conductivity; films grown ... See more keywords
Deposition Mechanism and Characterization of Plasma-Enhanced Atomic Layer-Deposited SnOx Films at Different Substrate Temperatures
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DOI: 10.3390/nano12162859
Abstract: The promising functional tin oxide (SnOx) has attracted tremendous attention due to its transparent and conductive properties. The stoichiometric composition of SnOx can be described as common n-type SnO2 and p-type Sn3O4. In this study,… read more here.
Keywords: enhanced atomic; atomic layer; plasma enhanced; substrate temperatures ... See more keywords