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Published in 2018 at "Journal of Electronic Materials"
DOI: 10.1007/s11664-018-06849-1
Abstract: Mo-SnSe multilayer films were deposited by multi-step magnetron sputtering. The Mo-SnSe multilayer films are then annealed, and the new phases including SnSe2 and MoSe2 are observed by x-ray diffraction and Raman spectroscopy. Scanning electron microscopy…
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Keywords:
magnetron sputtering;
microscopy;
multilayer films;
films deposited ... See more keywords