A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With ±6 m/s Linear Range
Sign Up to like & getrecommendations! Published in 2024 at "IEEE Journal of Solid-State Circuits"
DOI: 10.1109/jssc.2023.3314765
Abstract: This article presents a complementary metal-oxide semiconductor (CMOS)-microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system, which consists of a MEMS sensor with dual pairs of thermistors, a precise constant temperature difference (CTD) control circuit,… read more here.
Keywords: cmos; thermal flow; soc sensor; linear range ... See more keywords