Articles with "soft mems" as a keyword



Lithographically patternable SU-8/Graphene nanocomposite based strain sensors for soft-MEMS applications

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Published in 2024 at "Journal of Micromechanics and Microengineering"

DOI: 10.1088/1361-6439/ad690e

Abstract: This paper presents an optimized, lithographically patternable SU-8/Graphene nanocomposite based piezoresistive strain sensor for localized, high-precision assessment, which marks a significant advancement in the field of soft-MEMS based technologies. The fabrication process involves the photolithography… read more here.

Keywords: patternable graphene; nanocomposite based; lithographically patternable; soft mems ... See more keywords