Radio-Frequency Characteristics of Partial Dielectric Removal HR-SOI and TR-SOI Substrates
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DOI: 10.1088/0256-307x/34/6/068101
Abstract: High-resistivity silicon-on-insulator (HR-SOI) and trap-rich high-resistivity silicon-on-insulator (TR-SOI) substrates have been widely adopted for high-performance rf integrated circuits. Radio-frequency loss and non-linearity characteristics are measured from coplanar waveguide (CPW) transmission lines fabricated on HR-SOI and… read more here.
Keywords: soi substrates; radio frequency; soi soi; soi ... See more keywords