Mapping vapor – solid distributions of silicon germanium chemical vapor depositions
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DOI: 10.1016/j.mssp.2020.105516
Abstract: Abstract A Thermodynamic analysis of Si1-xGex Chemical Vapor Deposition via SiH4 and GeH4 was conducted for a complete determination of the Vapor – Solid distribution of Ge mole fraction. Explicit Vapor – Solid distributions are… read more here.
Keywords: chemical vapor; vapor; solid distributions; vapor solid ... See more keywords