Releasable SU-8 structures for various microfabrication processes using a water-soluble sacrificial layer
Sign Up to like & getrecommendations! Published in 2017 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2017.03.002
Abstract: A promising release technique for SU-8 using a water-soluble sacrificial layer based on germanium oxide is developed. The relatively high etching rate of germanium oxide in water and its high etching selectivity make it suitable… read more here.
Keywords: water; water soluble; sacrificial layer; using water ... See more keywords