Solvent immersion imprint lithography: A high-performance, semi-automated procedure
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DOI: 10.1063/1.4979575
Abstract: We expand upon our recent, fundamental report on solvent immersion imprint lithography (SIIL) and describe a semi-automated and high-performance procedure for prototyping polymer microfluidics and optofluidics. The SIIL procedure minimizes manual intervention through a cost-effective… read more here.
Keywords: immersion imprint; procedure; solvent immersion; performance ... See more keywords