Extended Design Space of Silicon-on-Nothing MEMS
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DOI: 10.1109/jmems.2019.2927466
Abstract: Complex monolithic Si MEMS can be created using a single mask by extending the empty-space-in-silicon (ESS) or silicon-on-nothing (SON) technology. The fabrication combines isotropic and anisotropic etching with selective removal of passivation layers followed by… read more here.
Keywords: silicon nothing; silicon; space silicon; space ... See more keywords