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Published in 2018 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2018.06.058
Abstract: Abstract This paper reports the prediction of optimal conditions to grow good quality crystalline thin films using the Close-Spaced Vapor Transport process. A new configuration of the horizontal reactor is used and presented. A thermodynamic…
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Keywords:
thin films;
spaced vapor;
vapor transport;
transport process ... See more keywords