Articles with "spatial ald" as a keyword



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Spatial atomic layer deposition for coating flexible porous Li-ion battery electrodes

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Published in 2018 at "Journal of Vacuum Science and Technology"

DOI: 10.1116/1.5006670

Abstract: Ultrathin atomic layer deposition (ALD) coatings on the electrodes of Li-ion batteries can enhance the capacity stability of the Li-ion batteries. To commercialize ALD for Li-ion battery production, spatial ALD is needed to decrease coating… read more here.

Keywords: flexible porous; atomic layer; layer deposition; ion ... See more keywords