Composite Wafer Defect Recognition Framework Based on Multiview Dynamic Feature Enhancement With Class-Specific Classifier
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DOI: 10.1109/tim.2023.3261924
Abstract: Wafer defect pattern recognition is important for the manufacturing of semiconductor products. By recognizing the type of defect, the engineer can optimize the process of semiconductor manufacturing. Due to the complexity of the manufacturing process,… read more here.
Keywords: wafer defect; class specific; specific classifier; framework ... See more keywords