Sputtering of silicon by atomic and cluster bismuth ions: An influence of projectile nuclearity and specific kinetic energy on the sputter yield
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DOI: 10.1016/j.vacuum.2021.110188
Abstract: Abstract An influence of the specific kinetic energy Esp and nuclearity n of Bin+ (n = 1–4) projectiles on the sputter yield of Si was studied by means of the volume loss method. It was found that… read more here.
Keywords: kinetic energy; energy; nuclearity; specific kinetic ... See more keywords