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Published in 2018 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927618003367
Abstract: The novel ultra-low voltage SEM Delta [1,2] allows electron spectroscopic imaging of both secondary (SE) and backscattered (BSE) electrons with a primary energy down to 50eV and a resolution better than 1nm. To recover the…
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Keywords:
sem;
bayesian analysis;
spectroscopic sem;
electron spectroscopic ... See more keywords