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Published in 2021 at "Micron"
DOI: 10.1016/j.micron.2021.103068
Abstract: This article addresses extraction of physically meaningful information from STEM EELS and EDX spectrum-images using methods of Multivariate Statistical Analysis. The problem is interpreted in terms of data distribution in a multi-dimensional factor space, which…
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Keywords:
physically meaningful;
meaningful endmembers;
spectrum images;
extraction physically ... See more keywords
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Published in 2017 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2017.06.023
Abstract: Principal Component Analysis (PCA) can drastically denoise STEM spectrum-images but might distort or cut off the important variations in data. The present paper analyzes various approaches to estimate such deviations and compares them with the…
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Keywords:
information pca;
pca;
spectrum images;
loss information ... See more keywords
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Published in 2019 at "Advanced Structural and Chemical Imaging"
DOI: 10.1186/s40679-019-0066-0
Abstract: STEM XEDS spectrum images can be drastically denoised by application of the principal component analysis (PCA). This paper looks inside the PCA workflow step by step on an example of a complex semiconductor structure consisting…
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Keywords:
principal component;
xeds spectrum;
spectrum images;
stem xeds ... See more keywords