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Published in 2022 at "Micromachines"
DOI: 10.3390/mi13071138
Abstract: High-speed digital microsystems has emerged as one of the most important solutions for improving system performance, bandwidth, and power consumption. Based on mature micro-system processing technology, a material extraction approach for silicon interposer applied for…
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Keywords:
high speed;
permittivity;
speed digital;
silicon interposer ... See more keywords