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Published in 2018 at "Journal of the Acoustical Society of America"
DOI: 10.1121/1.5035818
Abstract: We report a novel spintronic MEMS (Spin-MEMS) microphone, which is a new type of resistive microphone. For this microphone, spintronic strain-gauge sensors (Spin-SGSs) are integrated on a bulk micromachined diaphragm. The Spin-SGSs are based on…
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Keywords:
spin sgss;
mems microphone;
spintronic strain;
strain gauge ... See more keywords