A 4-view imaging to reveal microstructural differences in obliquely sputter-deposited tungsten films
Sign Up to like & getrecommendations! Published in 2020 at "Materials Letters"
DOI: 10.1016/j.matlet.2020.127381
Abstract: Abstract We report on the morphological disparity of the columnar growth in W thin films sputter-deposited by oblique angle deposition. Oriented tungsten thin films (400 ± 50 nm thick) are prepared using a tilt angle α of 80°… read more here.
Keywords: sputter deposited; view imaging; microstructural differences; imaging reveal ... See more keywords
Phase and microstructures in sputter deposited nanocrystalline Fe–Cr thin films
Sign Up to like & getrecommendations! Published in 2018 at "Materialia"
DOI: 10.1016/j.mtla.2018.07.007
Abstract: Abstract A series of FexCr1-x thin films (where X = 0 to 1) were magnetron sputter deposited. Their phase and microstructures were studied by transmission electron microscopy (TEM) and atom probe tomography (APT). The elemental films adopted… read more here.
Keywords: phase; thin films; sputter deposited; phase microstructures ... See more keywords
Heat degradation of sputter-deposited Cu(In,Ga)Se2 solar cells and modules: Impact of processing conditions and bias
Sign Up to like & getrecommendations! Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2018.12.040
Abstract: Abstract We report accelerated heat degradation studies on fully encapsulated Cu(In,Ga)Se2 modules as a function of film growth parameters, in particular back contact selenization (pre Se), as well as the impact of bias (light/voltage) during… read more here.
Keywords: heat degradation; heat; bias heat; degradation sputter ... See more keywords
Effects of ultra-low ethylene partial pressure on microstructure and composition of reactively sputter-deposited Ta–C thin films
Sign Up to like & getrecommendations! Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.137440
Abstract: Abstract We report on the effects of low ethylene (C2H4) partial pressures (6.7 × 10−5 ≤ Pc ≤ 6.7 × 10−2 Pa) on the composition and microstructure of Ta–C thin films grown on MgO(001) substrates via ultra-high vacuum dc magnetron sputtering of a TaC… read more here.
Keywords: thin films; spectroscopy; microstructure; low ethylene ... See more keywords
On the crystallization behavior of sputter-deposited a-Si films on 4H-SiC
Sign Up to like & getrecommendations! Published in 2020 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2020.137837
Abstract: Abstract The crystallization behavior of sputter-deposited amorphous silicon (a-Si) films on 4H-SiC by post-deposition annealing (PDA) is investigated. Film thicknesses between 100 and 1500 nm were selected. PDA was carried out at temperatures between 800 and… read more here.
Keywords: films sic; sputter deposited; sputter; microscopy ... See more keywords
Sputter-Deposited Amorphous Li3PO4 Solid Electrolyte Films
Sign Up to like & getrecommendations! Published in 2022 at "ACS Omega"
DOI: 10.1021/acsomega.2c02104
Abstract: This paper reports the thin-film synthesis of Li3PO4 solid electrolytes by RF magnetron sputtering. A relatively high ionic conductivity of more than 1 × 10–6 S cm–1 is achieved. It is revealed that the crystallization… read more here.
Keywords: sputter deposited; film; li3po4; deposited amorphous ... See more keywords
Broadband infrared absorber based on a sputter deposited hydrogenated carbon multilayer enhancing MEMS-based CMOS thermopile performance.
Sign Up to like & getrecommendations! Published in 2022 at "Applied optics"
DOI: 10.1364/oic.2022.mc.4
Abstract: Based on pulsed DC sputter deposition of hydrogenated carbon, an absorber optical coating with maximized broadband infrared absorptance is reported. Enhanced broadband (2.5-20 µm) infrared absorptance (>90%) with reduced infrared reflection is achieved by combining a… read more here.
Keywords: carbon; hydrogenated carbon; absorptance; broadband infrared ... See more keywords
Ultra-thin sputter-deposited infrared rugate mirror for enhancing solar-to-thermal energy conversion.
Sign Up to like & getrecommendations! Published in 2022 at "Optics letters"
DOI: 10.1364/ol.442839
Abstract: A dielectric mirror with high infrared reflection and high visible transmission, based on an easily fabricated stepped index rugate filter structure, is presented. Its fabrication involves sputtering depositions, using only two targets, to make five… read more here.
Keywords: solar thermal; ultra thin; mirror; sputter deposited ... See more keywords
The Seebeck Coefficient of Sputter Deposited Metallic Thin Films: The Role of Process Conditions
Sign Up to like & getrecommendations! Published in 2019 at "Coatings"
DOI: 10.3390/coatings9050299
Abstract: Because of their reduced dimensions and mass, thin film thermocouples are a promising candidate for embedded sensors in composite materials, especially for application in lightweight and smart structures. The sensitivity of the thin film thermocouple… read more here.
Keywords: thin films; seebeck coefficient; process conditions; film ... See more keywords
263 nm wavelength UV-C LED on face-to-face annealed sputter-deposited AlN with low screw- and mixed-type dislocation densities
Sign Up to like & getrecommendations! Published in 2022 at "Applied Physics Express"
DOI: 10.35848/1882-0786/ac66c2
Abstract: Regarding deep-ultraviolet optical device applications, face-to-face annealed sputter-deposited AlN (FFA Sp-AlN) is a promising alternative to the conventional metalorganic vapor phase epitaxy (MOVPE)-prepared AlN templates on sapphire substrates. However, FFA Sp-AlN tends to exhibit AlGaN… read more here.
Keywords: face; annealed sputter; deposited aln; face annealed ... See more keywords