A setup for arc-free reactive DC sputter deposition of Al-O-N
Sign Up to like & getrecommendations! Published in 2019 at "Surface and Coatings Technology"
DOI: 10.1016/j.surfcoat.2019.01.082
Abstract: Abstract Aluminum oxynitride (Al-O-N) is a material suitable for hard, transparent thin films. Its physical properties and structure can be adjusted through the O-to-N ratio. Reactive Direct Current Magnetron Sputtering (R-DCMS) is a practical, widespread… read more here.
Keywords: reactive sputter; arc free; sputter deposition; deposition ... See more keywords
Plasma-Induced Heating Effects on Platinum Nanoparticle Size During Sputter Deposition Synthesis in Polymer and Ionic Liquid Substrates
Sign Up to like & getrecommendations! Published in 2021 at "Langmuir"
DOI: 10.1021/acs.langmuir.1c01190
Abstract: Nanoparticle catalyst materials are becoming ever more important in a sustainable future. Specifically, platinum (Pt) nanoparticles have relevance in catalysis, in particular, fuel cell technologies. Sputter deposition into liquid substrates has been shown to produce… read more here.
Keywords: sputter deposition; particle size; temperature; liquid substrates ... See more keywords
Stable Cu2O Photoelectrodes by Reactive Ion Beam Sputter Deposition
Sign Up to like & getrecommendations! Published in 2018 at "Advances in Materials Science and Engineering"
DOI: 10.1155/2018/3792672
Abstract: Cu2O has been deposited on quartz substrates by reactive ion beam sputter deposition. Experimental results show that by controlling argon/oxygen flow rates, both n-type and p-type Cu2O samples can be achieved. The bandgap of n-type… read more here.
Keywords: sputter deposition; ion beam; cu2o; beam sputter ... See more keywords
Magnetron sputter deposition of Ta2O5-SiO2 quantized nanolaminates.
Sign Up to like & getrecommendations! Published in 2023 at "Optics express"
DOI: 10.1364/oe.487892
Abstract: Quantized nanolaminates are a type of optical metamaterials, which were discovered only recently. Their feasibility was demonstrated by atomic layer deposition and ion beam sputtering so far. In this paper, we will report on the… read more here.
Keywords: quantized nanolaminates; sputter deposition; magnetron sputter; deposition ... See more keywords