Effect of nanoconfinement on the sputter yield in ultrathin polymeric films: Experiments and model
Sign Up to like & getrecommendations! Published in 2018 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2018.03.041
Abstract: Abstract This fundamental contribution on secondary ion mass spectrometry (SIMS) polymer depth-profiling by large argon clusters investigates the dependence of the sputter yield volume (Y) on the thickness (d) of ultrathin films as a function… read more here.
Keywords: nanoconfinement sputter; effect nanoconfinement; sputter yield; yield ultrathin ... See more keywords
Influence of surface roughness on the sputter yield of Mo under keV D ion irradiation
Sign Up to like & getrecommendations! Published in 2021 at "Journal of Nuclear Materials"
DOI: 10.1016/j.jnucmat.2021.153135
Abstract: Abstract In this work the influence of surface roughness on the sputter yield of Mo under keV D ion bombardment was investigated for different impact angles. For this purpose, thin films of Mo (∼ 120… read more here.
Keywords: surface roughness; ion; sputter yield; surface ... See more keywords
Sputtering of silicon by atomic and cluster bismuth ions: An influence of projectile nuclearity and specific kinetic energy on the sputter yield
Sign Up to like & getrecommendations! Published in 2021 at "Vacuum"
DOI: 10.1016/j.vacuum.2021.110188
Abstract: Abstract An influence of the specific kinetic energy Esp and nuclearity n of Bin+ (n = 1–4) projectiles on the sputter yield of Si was studied by means of the volume loss method. It was found that… read more here.
Keywords: kinetic energy; energy; nuclearity; specific kinetic ... See more keywords