Improvement of the Properties of Direct-Current Magnetron-Sputtered Al-Doped ZnO Polycrystalline Films Containing Retained Ar Atoms Using 10-nm-Thick Buffer Layers
Sign Up to like & getrecommendations! Published in 2019 at "ACS Omega"
DOI: 10.1021/acsomega.9b01761
Abstract: The use of a 10-nm-thick buffer layer enabled tailoring of the characteristics, such as film deposition and structural and electrical properties, of magnetron-sputtered Al-doped ZnO (AZO) films containing unintentionally retained Ar atoms. The AZO films… read more here.
Keywords: magnetron sputtered; sputtered doped; thick buffer; doped zno ... See more keywords
Magnetron-sputtered Mg-Ga co-doped ZnO transparent conductive thin films: Microstructural and optoelectrical investigation
Sign Up to like & getrecommendations! Published in 2023 at "Materials Express"
DOI: 10.1166/mex.2023.2357
Abstract: The Mg–Ga co-doped ZnO (MGZO) transparent conducting thin films (TCTFs) were fabricated via magnetron-sputtering. The dependence of microstructural, morphological and optoelectrical characteristics on sputtering power was investigated. The findings demonstrate that all the TCTFs present… read more here.
Keywords: magnetron sputtered; thin films; zno transparent; doped zno ... See more keywords