Influence of deposition pressure and power on characteristics of RF-Sputtered Mo films and investigation of sodium diffusion in the films
Sign Up to like & getrecommendations! Published in 2018 at "Current Applied Physics"
DOI: 10.1016/j.cap.2018.02.014
Abstract: Abstract Mo films deposited by DC sputtering are widely used as back contact in CIGS and CZTS based thin film solar cells. However, there have been only a few studies on the deposition of Mo… read more here.
Keywords: pressure power; deposition pressure; power; sputtered films ... See more keywords
Effect of thickness on optical and microwave dielectric properties of Hydroxyapatite films deposited by RF magnetron sputtering
Sign Up to like & getrecommendations! Published in 2018 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2017.12.293
Abstract: Abstract This study present findings on the structural, optical and dielectric properties of polycrystalline Hydroxyapatite [HAp, Ca10(PO4)6(OH)2] films, deposited using radio-frequency (RF) magnetron sputtering. The X ray diffraction (XRD) studies revealed that the unit cell… read more here.
Keywords: magnetron sputtering; dielectric properties; sputtered films; microwave dielectric ... See more keywords
Processing, structure and properties of reactively sputtered films of titanium dioxide and suboxides
Sign Up to like & getrecommendations! Published in 2019 at "Thin Solid Films"
DOI: 10.1016/j.tsf.2019.06.001
Abstract: Abstract A series of TiOx(0 O) solid solution, TiO, Ti2O3, Magneli phases, rutile and anatase TiO2. With increasing the temperature, the crystallinity, and oxygen content of the films varied, which resulted in changes in film… read more here.
Keywords: films titanium; processing structure; properties reactively; sputtered films ... See more keywords