All-sputtered oxide thin-film transistors fabricated at 150 °C using simultaneous ultraviolet and thermal treatment
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DOI: 10.1039/c7tc04642a
Abstract: In this study, we report all-sputtered In–Ga–Zn–O (IGZO) thin-film transistors (TFTs) through the fabrication of a sputtered gate insulator. Furthermore, using simultaneous UV and thermal (SUT) treatment, we fabricate sputter-processed gate insulators at a low… read more here.
Keywords: sputtered oxide; treatment; thin film; using simultaneous ... See more keywords