Improvement of MoS2 Film Quality by Low Flux of Sputtered Particles Using a Molybdenum Grid
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DOI: 10.1109/jeds.2024.3502922
Abstract: Lowering the flux of sputtered particles using a molybdenum grid reduced the deposition rate of MoS2 films with an enlargement of the grain size measured by in-plane X-ray diffraction. The MoS2 film crystallinity evaluated by… read more here.
Keywords: flux; particles using; flux sputtered; sputtered particles ... See more keywords