Magnetron sputtered TiC/a:C nanocomposite thin films: Deposition parameters vs. properties
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DOI: 10.1016/j.vacuum.2019.03.012
Abstract: Abstract Titanium carbide/amorphous carbon (TiC/a:C) thin films have been extensively investigated in the past due to their wide applications in technology and industry. One of the most used preparation methods is a magnetron sputtering which… read more here.
Keywords: sputtered tic; thin films; mechanical properties; magnetron sputtered ... See more keywords