DC reactively sputtered TiNx thin films for capacitor electrodes
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DOI: 10.1007/s10854-018-9066-4
Abstract: Being used as typical electrode layers in the state-of-the-art microelectronic devices, titanium nitride (TiNx) thin films have to meet the critical requirements for high conductivity, low surface roughness and thickness. In this work, TiNx thin… read more here.
Keywords: thin films; sputtered tinx; surface roughness; tinx thin ... See more keywords