Prediction and experimental determination of the layer thickness in SIMS depth profiling of Ge/Si multilayers: Effect of preferential sputtering and atomic mixing
Sign Up to like & getrecommendations! Published in 2019 at "Applied Surface Science"
DOI: 10.1016/j.apsusc.2019.03.223
Abstract: Abstract A comparison is performed between the experimentally determined variation of the layer thickness at 50 at% with the primary ion energy and the prediction of this variation and of the layer thickness at 50% amplitude… read more here.
Keywords: layer thickness; sims depth; preferential sputtering; thickness ... See more keywords