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Published in 2021 at "Ferroelectrics"
DOI: 10.1080/00150193.2021.1888271
Abstract: Abstract Barium-strontium niobate Sr0.5Ba0.5Nb2O6 thin films were fabricated on MgO(001) substrates by RF cathode deposition in an oxygen atmosphere at various values of the introduced RF power (from 70 W to 140 W). According to X-ray diffraction…
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Keywords:
conditions microstructure;
thin films;
sputtering conditions;
sr0 5ba0 ... See more keywords
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Published in 2020 at "Technical Physics Letters"
DOI: 10.1134/s1063785020070238
Abstract: Abstract Using the method of DC magnetron sputtering, nonstructured amorphous metal coatings of Zr 75 Pd 25 composition were obtained with an average deposition rate of 1.3 nm/s at a substrate temperature of 40°C, while…
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Keywords:
sputtering conditions;
influence magnetron;
structure coatings;
magnetron ... See more keywords