Stress control in optical thin films by sputtering and electron beam evaporation.
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DOI: 10.1364/ao.56.00c131
Abstract: It is necessary to control the internal stress of optical thin films in order to address problems such as peeling and cracking. Internal stress differs among films prepared by different deposition methods. We investigated the… read more here.
Keywords: internal stress; thin films; sputtering electron; evaporation ... See more keywords