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Published in 2023 at "Technical Physics Letters"
DOI: 10.21883/tpl.2023.01.55343.19206
Abstract: To calculate the angular dependence of the threshold sputtering energy on the ratio of the target masses and incident ions, the target surface blocking phenomenon is used. It is established that the angular dependence of…
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Keywords:
incidence angle;
threshold sputtering;
energy;
sputtering energy ... See more keywords