Theoretical dependence of the target threshold sputtering energy on the incidence angle of primary ions
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DOI: 10.21883/tpl.2023.01.55343.19206
Abstract: To calculate the angular dependence of the threshold sputtering energy on the ratio of the target masses and incident ions, the target surface blocking phenomenon is used. It is established that the angular dependence of… read more here.
Keywords: incidence angle; threshold sputtering; energy; sputtering energy ... See more keywords