Articles with "sputtering gas" as a keyword



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Effects of sputtering gas on microstructure and tribological properties of titanium nitride films

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Published in 2019 at "Applied Surface Science"

DOI: 10.1016/j.apsusc.2019.05.148

Abstract: Abstract Titanium nitride (TiN) films can be utilized as hard and protective coatings for synchronizer ring, which is the key components of the car gearbox. The tribological properties of synchronizer ring play a key role… read more here.

Keywords: gas; argon; tribological properties; synchronizer ring ... See more keywords
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Study of ZrO2 coatings on 316L SS as a function of sputtering gas flow rate for biomedical applications

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Published in 2021 at "Surface and Coatings Technology"

DOI: 10.1016/j.surfcoat.2021.127673

Abstract: Abstract Coatings have attracted much attention because they improve the surface properties while retain favorable bulk properties. For the development of coatings in biomedical applications, the combination of the mechanical characteristics, tribological properties, corrosion behavior,… read more here.

Keywords: gas flow; gas; zro2 coatings; sputtering gas ... See more keywords
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Microstructure and adsorption characteristics of Zr–Co–RE getter films deposited using krypton as sputtering gas

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Published in 2023 at "AIP Advances"

DOI: 10.1063/5.0152974

Abstract: The vacuum level in micro-electro-mechanical system devices needs to be achieved and maintained using non-evaporable getter film technology. Zr–Co–RE getter films are deposited by direct current (DC) magnetron sputtering using krypton (Kr) as the sputtering… read more here.

Keywords: adsorption; films deposited; sputtering power; sputtering gas ... See more keywords
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How the sputtering process influence structural, optical, and electrical properties of Zn3N2 films?

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Published in 2018 at "MRS Communications"

DOI: 10.1557/mrc.2018.50

Abstract: The use of zinc nitride (Zn 3 N 2 ) films as a transparent electrode in various electronic devices has attracted much attention owing to its high-carrier mobility. In this study, we investigate the influence… read more here.

Keywords: structural optical; sputtering process; gas; optical electrical ... See more keywords