A comparative study on the properties of chromium coatings deposited by magnetron sputtering with hot and cooled target
Sign Up to like & getrecommendations! Published in 2017 at "Vacuum"
DOI: 10.1016/j.vacuum.2017.03.020
Abstract: Abstract This article reports on the analysis of energy flux density to the substrate and results of the detailed study of properties of Cr coatings deposited by magnetron sputtering with hot and cooled Cr targets.… read more here.
Keywords: magnetron sputtering; deposited magnetron; target; coatings deposited ... See more keywords
Sputtering of a hot ceramic target: Experiments with ZnO
Sign Up to like & getrecommendations! Published in 2019 at "Vacuum"
DOI: 10.1016/j.vacuum.2019.108854
Abstract: Abstract The sputtering of hot metal targets is a rapidly developing field in the technology of magnetron sputtering systems, aimed at solving certain challenges inherent in advancing the potential of magnetron sputtering: how to increase… read more here.
Keywords: hot ceramic; target; sputtering hot; magnetron sputtering ... See more keywords