One-step H2S reactive sputtering for 2D MoS2/Si heterojunction photodetector.
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DOI: 10.1088/1361-6528/ab7606
Abstract: A technique for directly growing two-dimensional (2D) materials onto conventional semiconductor substrates, enabling high-throughput and large-area capability, is required to realise competitive 2D transition metal dichalcogenide devices. A reactive sputtering method based on H2S gas… read more here.
Keywords: sputtering mos2; mos2 heterojunction; photodetector; reactive sputtering ... See more keywords