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Published in 2019 at "Journal of Alloys and Compounds"
DOI: 10.1016/j.jallcom.2018.09.056
Abstract: Abstract We have systematically investigated the effects of four critical sputtering parameters, power, pressure, temperature, and time, on the sheet resistance and optical transmittance of aluminum doped zinc oxide (AZO) grown by RF magnetron sputtering.…
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Keywords:
czts;
sheet resistance;
sputtering parameters;
solar cell ... See more keywords