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Published in 2021 at "Optical and Quantum Electronics"
DOI: 10.1007/s11082-021-02876-1
Abstract: Optical, structural and electrical properties of Au thin films (20, 40, 60, 80 and 100 nm) deposited on poly(vinyl chloride) substrates by sputtering process were investigated. The deposition of gold thin layers was carried out under…
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Keywords:
electrical properties;
thin films;
properties pvc;
gold thin ... See more keywords
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Published in 2017 at "Applied Physics Letters"
DOI: 10.1063/1.4973643
Abstract: Correlation between the plasma self-organization areas (also known as ionization zones or spokes) and the ground state/metastable atoms behavior during magnetron sputtering glow discharge is investigated. High-power impulse magnetron sputtering case is considered. For this…
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Keywords:
magnetron sputtering;
plasma;
sputtering process;
self organization ... See more keywords
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Published in 2021 at "Semiconductor Science and Technology"
DOI: 10.1088/1361-6641/abe140
Abstract: This work presents the electrical properties of amorphous gallium-doped indium zinc tin oxide (Ga-IZTO) thin film transistors (TFTs), as a function of O2 flow rate (Ar/O2), during the sputtering process of the channel layer. As…
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Keywords:
flow rate;
sputtering process;
thin film;
electrical properties ... See more keywords
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Published in 2018 at "MRS Communications"
DOI: 10.1557/mrc.2018.50
Abstract: The use of zinc nitride (Zn 3 N 2 ) films as a transparent electrode in various electronic devices has attracted much attention owing to its high-carrier mobility. In this study, we investigate the influence…
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Keywords:
structural optical;
sputtering process;
gas;
optical electrical ... See more keywords