Effect of Gas Composition During Pt Sputtering on Structural and Magnetic Properties of CoFeB Thin Films
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DOI: 10.1109/lmag.2022.3225742
Abstract: Ultrathin Ta/CoFeB/Pt trilayer structures are relevant to a wide range of spintronic applications, from magnetic tunnel junctions to skyrmionics devices. Controlling the perpendicular magnetic anisotropy, Gilbert damping, and Dzyaloshinskii–Moriya interaction (DMI) in the CoFeB layer… read more here.
Keywords: gas; sputtering structural; composition sputtering; effect gas ... See more keywords