Amorphous carbon films with MoCu dual-doping deposited by a hybrid sputtering system
Sign Up to like & getrecommendations! Published in 2018 at "Diamond and Related Materials"
DOI: 10.1016/j.diamond.2018.05.018
Abstract: Abstract Amorphous carbon films containing a wide-range content of Mo and a small amount of Cu (MoCu:a-C films) were prepared by a hybrid sputtering system. The influences of the doping contents of MoCu on the… read more here.
Keywords: hybrid sputtering; amorphous carbon; carbon films; carbide nanoparticles ... See more keywords
Effect of N doping on the microstructure and dry etch properties of amorphous carbon deposited with a DC sputtering system
Sign Up to like & getrecommendations! Published in 2023 at "RSC Advances"
DOI: 10.1039/d2ra06808g
Abstract: The importance of developing a hardmask with excellent performance, and physical and chemical properties to utilize in long-term etching is spotlighted due to the acceleration of development in high-density semiconductors. To develop such a hardmask,… read more here.
Keywords: carbon; sputtering system; amorphous carbon; nitrogen ... See more keywords